Coriolis flow meters for microelectronics

Coriolis force does the measuring: the medium flows through vibrating tubes, and the flow displaces the phase of their oscillation. The phase shift is proportional to mass flow, so the meter outputs mass directly, with no compensation for density or temperature.

Across wet processes and media handling: photolithography, chemical-mechanical planarization, wafer etching and cleaning, plus dosing of specialty gases for deposition and plasma etching. The typical media of each stage are listed under Typical media on this page.

Along with mass flow, density and temperature are measured; the density range is 650–2000 kg/m³. These channels run alongside the flow signal and are used to monitor process liquids, not as auxiliary readings only.

Mass is measured directly — no conversion via density or temperature corrections, and no straight-run requirements before or after the sensor. Volumetric devices depend on density, viscosity and the flow profile, so matching the same accuracy calls for corrections and stable conditions.

Entrained gas is the key constraint — bubbles in a liquid lower accuracy. Bigger line sizes are more expensive than volumetric meters, and aggressive fluids demand specific materials and executions. Accuracy, footprint and budget pull in different directions, so the data sheet settles the trade-off.

Yes — resists across exposure classes (i-line, KrF, ArF, EUV), BARC and TARC coatings, developers and rinse solutions are standard media here. DN01–DN08 sensors with minimal internal volume handle microlitre-range dispensing and keep losses of expensive chemicals low.

It does, once the execution is matched to the slurry. CMP media based on colloidal silica, cerium oxide and alumina flow through a smooth path with no dead zones or rubbing seals. State the abrasive content and solids concentration in your data sheet, as they drive sensor and tube material selection.

Suitable. Tube material is chosen by aggressiveness: Hastelloy C4/C276 covers sulfuric and hydrochloric acids and fluorine-bearing media, while tantalum is available for the hardest cases, including hydrofluoric acid and aqua regia. The material options are detailed further down this page.

Both classes are supported: ultrapure water (UPW, semiconductor grade) and organic solvents — isopropanol, acetone, NMP, PGME, EBR blends. The base material for these is 316L stainless steel with an electropolished surface that reduces contamination risk in the wetted path.

DN01–DN08 compact sensors target micro-flow duties: minimal internal volume and a stable zero point at the bottom of the range. That lets you dispense small portions of expensive photochemicals while the small dead volume limits product losses during changeover.

Gases are within scope too: inert and blanket gases — nitrogen, argon, helium; process gases — CF₄, NF₃, WF₆, SiH₄, ammonia, N₂O; and liquefied LN₂ and LAr. Allowable error for gas service is ±0.5–1.0% depending on size.

Start from the medium. UPW, solvents and milder liquids are fine with electropolished 316L; acids and halogens call for Hastelloy C4/C276; for the most aggressive fluids tantalum is available. We confirm the final choice against concentration and temperature.

For wafer-process dosing, the small DN01–DN08 sensors are the recommended fit. The family is broader: for DN01–DN50 the published liquid flow span is 1.2 to 39 000 kg/h. The exact size follows from flow rate, viscosity and allowable pressure loss.

It depends on the installation. ME100 has a local display and buttons, a 4–20 mA HART analog output and an Ex db ib IIC T6 Gb version. ME400 is more compact: no display, remote setup via M-link software, 24 V supply, and no hazardous-area rating.

Base execution holds up to 10 MPa. Higher-pressure options are the P version — up to 45 MPa on main sizes — and the PK range, up to 96 MPa within the 003…PK sizes. The type description tables show the maximum for each individual line size.

The family covers −196…+350 °C. The cryogenic L execution goes down to −196 °C for liquefied gas lines (LN₂, LAr), while the high-temperature C version reaches +350 °C. The execution is fixed to the actual process temperature.

Start from your process data: medium, flow range, pressure, temperature, connection, and any hazardous-area requirements. Send it via the data sheet or the site configurator, and we will come back with a suitable execution and a quotation. Price depends on line size, materials, pressure and Ex version.

For electronics duties the headline figure is ±0.1% with ±0.05% repeatability; the key parameters table lists ±0.1–0.2% depending on size. Every meter is calibrated individually on a flow rig. Gas service is rated ±0.5–1.0% by size.

The meter is entered in the State Register of Measuring Instruments under No. 98506-26. That confirms type approval and allows use in the sphere of state metrological regulation — custody transfer and supplier-to-customer settlements. The metrological documents are published on the site.

Verification is possible either way: a calibration rig with reference meters, or on-site provers while the meter stays in the line. The company supplies both kinds of prover hardware — pipe provers and compact provers.

A turndown of up to 100:1 is the ratio of maximum to minimum flow within which rated accuracy is maintained — useful for varying dispensing regimes. Zero-point stability matters at the low end, where the smallest portions are dosed.

No straight runs are needed: the sensor does not rely on a stabilised flow profile upstream or downstream, unlike turbine, vortex and ultrasonic meters. That simplifies integration into compact chemical delivery panels and replacement on existing lines.

Orientation is flexible; for settling or fouling media the sensor is positioned to drain itself. The smooth, dead-zone-free path is suitable for CIP/SIP cleaning and faster product changeover. Project-specific installation guidance is given at the design stage and in the operating manual.

The standard set includes 4–20 mA with HART and RS-485 Modbus RTU; frequency/pulse output and CAN are available across the family, and PROFIBUS PA is an option depending on execution. Integration with DCS and dispensing equipment is a routine task.

Sensor marking depends on the transmitter: Ex ib IIC T6…T1 Gb with ME100, Ex ia IIC T6…T1 Ga with ME200. The transmitters carry Ex db ib IIC T6 Gb (ME100) and Ex db ia IIC T6 Gb (ME200); the room classification decides whether this protection is required.

In many cases yes — replacement is a dedicated selection path: we match mounting and process dimensions and interfaces, and often no welding is required. Meters already on the line (Micro Motion and Endress+Hauser included) are cross-checked against a piping drawing; a nameplate photo is enough to start.

Shipping paperwork covers metrology and operation: TR CU (EAEU) certificates, type description, verification procedure, operating manual. Two warranty clocks start ticking — 18 months at delivery, 12 months at installation — and the earlier expiry date governs.

Yes: commissioning supervision, startup, service and verification are performed in Russia. Visits are scheduled together with the customer so they do not interfere with the production schedule or planned line stops.

No scheduled maintenance applies: the sensor contains neither moving assemblies nor wear parts, so there is simply nothing to service. Rated service life averages 20 years; mean time between failures is 100,000 hours. Vibration testing follows GOST R IEC 60068-2-6 (5–55 Hz, 0.35 mm, three axes).

Yes — the meter can be supplied on its own or inside a ready solution: metering units and skids are built around Mass-EXPERT, from a single dosing line up to a complete system. Scope and layout are agreed per project with your engineering team.